Line pressure regulators and Shut off valves

LDPRR

Pressure Regulator Series

The LDPRR pressure regulator series is the pressure reducing regulator designed to use at the special manufacturing line of ultrahigh pure semi-conductors, bulk gas lines, and other facility lines. In order to use at the semi-conductor hook-up line, regulator’s internal surface is treated to the level of E.P. 10Ra, 5Ra under B. A. grade. A special locking-plate system has developed and applied. All the process assembly, welding, testing and washing of this series is carried out and thoroughly managed in clean room.

Developed push and lock type handle which completely prevents the self-change of pre-set value which can be caused by the vibration from outside or minute vibration at the gas pipeline. You can prevent the self-changing of preset value just by pushing the handle and reset the value freely by drawing the handle.

FUNCTIONAL SCHEMATIC

DIMENSIONS

SPECIFICATIONS

VCR TYPE REGULATOR
DESIGNED FOR SEMICONDUCTOR APPLICATIONS
INTERNAL SURFACES B. A. GRADE TO E.P.10 RA, 5 RA
ALL PERFORMED IN CLASS 100 AND CLASS 10 CLEAN-ROOMS
THREADLESS TYPE
LOCKING-PLATE SEAL SYSTEM
 

ORDERING INFORMATION

LDPRR Series
  • Pressure reducing regulator for Ultra high purity series rated for semiconductor
B Body material
  • B: Electropolish Stainless steel 316L 10Ra
100 Max outlet pressure
  • 100: 0.1-7 bar (1-100 psig)
S Diaphragm material
  • S: Stainless Steel 316L
H Max inlet pressure
  • H: 3500 psig (238 bar)
P Seat material
  • P: PCTFE
S Flow capacity
  • S: Cv 0.06 standard 0-3000 psig, 1/4"
4MS Inlet/Oulet ports size
  • 4MS: 1/4 Male VCR inlet/outlet
G1S Gauge
  • G1S: Gauge 1/4" installed

LDMSV

 

ULTRA HIGH PURITY MANUAL SHUT OFF VALVE

 

The LDMSV manual diaphragm shutoff valve series is specially designed for ultra high purity applications where sub ppb detection and trace analysis are required. This manual shut off valve can be mounted upfront the analytical devices/sensors or used for isolation/bypass lines mounted with purifiers/traps. They are also perfect to be mounted on the pressure regulators outlets and the sampling systems. Having a ¼ turn handle which interact on a diaphragm sealing makes it ideal for quick and precise shutoff without dead volume or leakage. The body is made of Stainless Steel 316L welded, and connections are face seal ¼ type to ensure the purity level.

DIMENSIONS

 

SPECIFICATIONS

PRESSURE RATING
  • Vacuum to 290 psig (20 bar)
TEMPERATURE RATING
  • -9.4°F ~ 149°F (-23°C ~ 65°C)
FLOW COEFFICIENT
  • 0.60
BODY MATERIAL
  • SS316L
DIAPHRAGM MATERIAL
  • Ni-Co Alloy
HANDLE MATERIAL
  • Aluminum (Blue) Handle shape provides visual identification of OPEN and CLOSED positions

 

ORDERING INFORMATION

LDMSV Series
  • ¼ turn diaphragm shutoff valve for Ultra high purity rated for semiconductor
S Body material
  • S: Electropolish Stainless steel 316L
4FS Inlet/Outlet ports size
  • 4FS: ¼ Female VCR inlet/outlet

 

LDPSV

 

ULTRA HIGH PURITY PNEUMATIC SHUT OFF VALVE

 

The pneumatic diaphragm shutoff valve series is specially designed for ultra high purity applications where sub ppb detection and trace analysis are required. This pneumatic shut off valve can be mounted upfront the analytical devices/sensors or used for isolation/bypass lines mounted with purifiers/traps. They are also perfect to be mounted on the pressure regulators outlets and the sampling systems. Having a pneumatic actuation which interact on a diaphragm sealing makes it ideal for quick and precise shutoff without dead volume or leakage for remote applications. Ideal for stream selector systems to be controlled remotely. The body is made of Stainless Steel 316L welded, and connections are face seal ¼ type to ensure the purity level. The valve can be configured with normally open or normally close position.

DIMENSIONS

 

SPECIFICATIONS

PRESSURE RATING
  • 250 psig (17.2 bar)
TEMPERATURE RATING
  • -10 to 160°F (-23 to 65°C)
FLOW COEFFICIENT
  • 0.27
PORT POSITION
  • NC or NO
BODY MATERIAL
  • SS316L for Ultrahigh Purity Applications
FULLY SWEPT FLOW PATH
  • Minimizes Entrapment Areas and Maximizes Flow Capacity
FULLY CONTAINED PCTFE SEAT DESIGN PROVIDES:
  • Outstanding Resistance to Swelling and Contamination
  • Improved Helium Leak Test Performance
  • Minimal Particle Generation
  • Long Cycle Life
DIAPHRAGM
  • Excellent in Strength and Corrosion Resistance
  • Optimal Design for Long Cycle Life

 

ORDERING INFORMATION

LDPSV Series
  • 1⁄4 turn pneumatic diaphragm shutoff valve for Ultra high purity rated for semiconductor

S Body material
  • S: Electropolish Stainless steel 316L
4FS Inlet/Outlet ports size
  • 4FS: ¼ Female VCR inlet/outlet
NC/NO Port position
  • NC: Normally close position

    NO: Normally open position

 

Pressure regulators & Valves Application Notes